System for introducing a precursor gas to a vapor deposition system

ABSTRACT

A system for introducing a precursor vapor to a processing chamber configured for forming a thin metal on a substrate is described. The vapor delivery system includes means for introducing a dilution gas to the precursor vapor and adjusting the spatial distribution of the dilution gas addition in order to affect improvements to the properties of the deposited film.

CROSS REFERENCE TO RELATED APPLICATIONS

The present invention is related to commonly-owned pending U.S. patentapplication Ser. No. 11/277,911, entitled “METHOD FOR INTRODUCING APRECURSOR GAS TO A VAPOR DEPOSITION SYSTEM” and filed on even dateherewith; commonly-owned U.S. patent application Ser. No. 10/996,145,now U.S. Pat. No. 7,270,848 issued Sep. 18, 2007, and entitled “METHODFOR INCREASING DEPOSITION RATES OF METAL LAYERS FROM METAL-CARBONYLPRECURSORS”; and commonly-owned U.S. patent application Ser. No.10/996,144, now U.S. Pat. No. 7,279,421 issued Oct. 9, 2007, andentitled “METHOD AND DEPOSITION SYSTEM FOR INCREASING DEPOSITION RATESOF METAL LAYERS FROM METAL-CARBONYL PRECURSORS”, the entire contents ofwhich are herein incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of Invention

The present invention relates to a system for thin film deposition, andmore particularly to a system for improving the uniformity of metallayers formed from metal carbonyl precursors.

2. Description of Related Art

The introduction of copper (CU) metal into multilayer metallizationschemes for manufacturing integrated circuits can necessitate the use ofdiffusion barriers/liners to promote adhesion and growth of the Culayers and to prevent diffusion of Cu into the dielectric materials.Barriers/liners that are deposited onto dielectric materials can includerefractive materials, such as tungsten (W), molybdenum (Mo), andtantalum (Ta), that are non-reactive and immiscible in Cu, and can offerlow electrical resistivity. Current integration schemes that integrateCu metallization and dielectric materials can require barrier/linerdeposition processes at substrate temperature between about 400° C. andabout 500° C., or lower.

For example, Cu integration schemes for technology nodes less than orequal to 130 nm can utilize a low dielectric constant (low-k)inter-level dielectric, followed by a physical vapor deposition (PVD) Talayer or a TaN/Ta layer, followed by a PVD Cu seed layer, and anelectro-chemical deposition (ECD) Cu fill. Generally, Ta layers arechosen for their adhesion properties (i.e., their ability to adhere onlow-k films), and Ta/TaN layers are generally chosen for their barrierproperties (i.e., their ability to prevent Cu diffusion into the low-kfilm).

As described above, significant effort has been devoted to the study andimplementation of thin transition metal layers as Cu diffusion barriers,these studies including such materials as chromium, tantalum, molybdenumand tungsten. Each of these materials exhibits low miscibility in Cu.More recently, other materials, such as ruthenium (Ru) and rhodium (Rh),have been identified as potential barrier layers since they are expectedto behave similarly to conventional refractory metals. However, the useof Ru or Rh can permit the use of only one barrier layer, as opposed totwo layers, such as Ta/TaN. This observation is due to the adhesive andbarrier properties of these materials. For example, one Ru layer canreplace the Ta/TaN barrier layer. Moreover, current research is findingthat the one Ru layer can further replace the Cu seed layer, and bulk Cufill can proceed directly following Ru deposition. This observation isdue to good adhesion between the Cu and the Ru layers.

Conventionally, Ru layers can be formed by thermally decomposing aruthenium-containing precursor, such as a ruthenium carbonyl precursor,in a thermal chemical vapor deposition (TCVD) process. Materialproperties of Ru layers that are deposited by thermal decomposition ofruthenium carbonyl precursors (e.g., Ru₃(CO)₁₂) can deteriorate when thesubstrate temperature is lowered to below about 400° C. As a result, anincrease in the (electrical) resistivity of the Ru layers and poorsurface morphology (e.g., the formation of nodules) at low depositiontemperatures has been attributed to increased incorporation of reactionby-products into the thermally deposited Ru layers. Both effects can beexplained by a reduced carbon monoxide (CO) desorption rate from thethermal decomposition of the ruthenium carbonyl precursor at substratetemperatures below about 400° C.

Additionally, the use of metal carbonyls, such as ruthenium carbonyl orrhenium carbonyl, can lead to poor deposition rates due to their lowvapor pressure, and the transport issues associated therewith. Overall,the inventors have observed that current deposition systems suffer fromsuch a low rate, making the deposition of such metal films impractical.Furthermore, the inventors have observed that current deposition systemssuffer from poor film uniformity.

SUMMARY OF THE INVENTION

A method and system is provided for improving the transport of precursorvapor in a thin film deposition system.

According to one embodiment, a deposition system for forming a thinmetal film on a substrate is described, comprising: a process chamberhaving a substrate holder configured to support the substrate and heatthe substrate, and a pumping system configured to evacuate the processchamber; a metal precursor vaporization system configured to evaporate ametal carbonyl precursor to form a metal carbonyl precursor vapor; avapor distribution system configured to introduce the metal carbonylprecursor vapor above the substrate and a dilution gas above thesubstrate, wherein the vapor distribution system is configured to adjusta distribution of the partial pressure of the dilution gas above thesubstrate; a dilution gas source coupled to the vapor distributionsystem and configured to supply the dilution gas to the vapordistribution system; a vapor delivery system having a first end coupledto an outlet of the metal carbonyl precursor vaporization system and asecond end coupled to an inlet of the vapor distribution system of theprocess chamber; a gas supply system coupled to at least one of themetal precursor vaporization system or the vapor delivery system, orboth, and configured to supply a CO gas to transport the metal precursorvapor in the CO gas to the inlet of the vapor distribution system.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIG. 1 depicts a schematic view of a deposition system according to anembodiment of the invention;

FIG. 2 depicts a schematic view of a deposition system according toanother embodiment of the invention;

FIGS. 3-7 depict schematic cross-sectional views of gas injectionsystems according to various alternate embodiments of the invention;

FIG. 8 is a process flow diagram illustrating a method of depositing ametal layer on a substrate according to an embodiment of the invention;and

FIGS. 9A through 9C schematically show, in cross-sectional views,formation of a metal layer on a patterned substrate according toembodiments of the invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

In the following description, in order to facilitate a thoroughunderstanding of the invention and for purposes of explanation and notlimitation, specific details are set forth, such as a particulargeometry of the deposition system and descriptions of variouscomponents. However, it should be understood that the invention may bepracticed in other embodiments that depart from these specific details.

Referring now to the drawings, wherein like reference numerals designateidentical or corresponding parts throughout the several views, FIG. 1schematically illustrates a thermal chemical vapor deposition system 1for depositing a metal layer on a substrate from a metal carbonylprecursor, according to one embodiment. While other metal carbonylprecursors may be used, embodiments of the invention may henceforth bedescribed with particular reference to ruthenium carbonyl precursors,such as Ru₃(CO)₁₂, with the understanding that the invention is not solimited. The deposition system 1 comprises a process chamber 10 having asubstrate holder 20 configured to support a substrate 25, upon which themetal layer is formed. The process chamber 10 is coupled to a metalprecursor vaporization system 50 via a vapor precursor delivery system40.

The process chamber 10 is further coupled to a vacuum pumping system 38through a duct 36, wherein the pumping system 38 is configured toevacuate the process chamber 10, vapor precursor delivery system 40, andmetal precursor vaporization system 50 to a pressure suitable forforming the metal layer on the substrate 25, and suitable forevaporation (or sublimation) of the metal carbonyl precursor 52 in themetal precursor vaporization system 50.

Still referring to FIG. 1, the metal precursor vaporization system 50 isconfigured to store a metal carbonyl precursor 52, to heat the metalcarbonyl precursor 52 to a temperature sufficient for vaporizing themetal carbonyl precursor 52, and to introduce metal carbonyl precursorvapor to the vapor precursor delivery system 40. The metal carbonylprecursor 52 can be solid under the selected heating conditions in themetal precursor vaporization system 50. Alternately, the metal carbonylprecursor 52 can be a liquid. The terms “vaporization,” “sublimation”and “evaporation” are used interchangeably herein to refer to thegeneral formation of a vapor (gas) from a solid or liquid precursor,regardless of whether the transformation is, for example, from solid toliquid to gas, solid to gas, or liquid to gas. Below, the use of a solidmetal carbonyl precursor 52 is described; however, those skilled in theart will appreciate that metal carbonyl precursors that are liquidsunder the selected heating conditions can be used without departing fromthe scope of the invention. For instance, the metal carbonyl precursorcan have the general formula M_(x)(CO)_(y), and can comprise a tungstencarbonyl, a molybdenum carbonyl, a cobalt carbonyl, a rhodium carbonyl,a rhenium carbonyl, a chromium carbonyl, or an osmium carbonyl, or acombination of two or more thereof. These metal carbonyls include, butare not limited to, W(CO)₆, Ni(CO)₄, Mo(CO)₆, Co₂(CO)₈, Rh₄(CO)₁₂,Re₂(CO)₁₀, Cr(CO)₆, Ru₃(CO)₁₂, or Os₃(CO)₁₂, or a combination of two ormore thereof.

In order to achieve the desired temperature for vaporizing the metalcarbonyl precursor 52 (e.g., subliming the solid metal carbonylprecursor 52), the metal precursor vaporization system 50 is coupled toa vaporization temperature control system 54 configured to control thevaporization temperature. For instance, the temperature of the metalcarbonyl precursor 52 is generally elevated to approximately 40° C. to45° C. in conventional systems in order to sublime the rutheniumcarbonyl Ru₃(CO)₁₂. At this temperature, the vapor pressure of theRu₃(CO)₁₂, for instance, ranges from approximately 1 to approximately 3mTorr. As the metal carbonyl precursor is heated to cause evaporation(or sublimation), a carrier gas can be passed over or through the metalcarbonyl precursor 52, or any combination thereof. The carrier gas caninclude, for example, an inert gas, such as a noble gas, He, Ne, Ar, Kr,or Xe, or a combination of two or more thereof. Alternately, otherembodiments contemplate omitting the inert carrier gas.

According to an embodiment of the invention, a CO gas can be added tothe inert carrier gas. Alternately, other embodiments contemplate the COgas replacing the inert carrier gas. For example, a gas supply system 60is coupled to the metal precursor vaporization system 50, and it isconfigured to, for instance, supply a carrier gas, a CO gas, or amixture thereof, beneath the metal carbonyl precursor 52 via feed line61, or over the metal carbonyl precursor 52 via feed line 62. Inaddition, or in the alternative, the gas supply system 60 is coupled tothe vapor precursor delivery system 40 downstream from the metalprecursor vaporization system 50 to supply the gas to the vapor of themetal carbonyl precursor 52 via feed line 63 as or after it enters thevapor precursor delivery system 40. Although not shown, the gas supplysystem 60 can comprise a carrier gas source, a CO gas source, one ormore control valves, one or more filters, and a mass flow controller.For instance, the flow rate of the inert carrier gas can be betweenabout 0.1 standard cubic centimeters per minute (sccm) and about 1000sccm. Alternately, the flow rate of the inert carrier gas can be betweenabout 10 sccm and about 500 sccm. Still alternately, the flow rate ofthe inert carrier gas can be between about 50 sccm and about 200 sccm.According to embodiments of the invention, the flow rate of the CO gascan range from approximately 0.1 sccm to approximately 1000 sccm.Alternately, the flow rate of the CO gas can be between about 1 sccm andabout 100 sccm.

Downstream from the metal precursor vaporization system 50, the metalprecursor vapor flows with the CO gas and optional inert carrier gasthrough the vapor delivery system 40 until it enters a vapordistribution system 30 coupled to or within the process chamber 10. Thevapor delivery system 40 can be coupled to a vapor line temperaturecontrol system 42 in order to control the vapor line temperature andprevent decomposition of the metal precursor vapor as well ascondensation of the metal precursor vapor. For example, the vapor linetemperature can be set to a value approximately equal to or greater thanthe vaporization temperature. Additionally, for example, the vapordelivery system 40 can be characterized by a high conductance in excessof about 50 liters/second.

Referring again to FIG. 1, the vapor distribution system 30, coupled tothe process chamber 10, comprises a plenum 32 within which the vapordisperses prior to passing through a vapor distribution plate 34 andentering a processing zone 33 above substrate 25. In addition, the vapordistribution plate 34 can be coupled to a distribution plate temperaturecontrol system 35 configured to control the temperature of the vapordistribution plate 34. For example, the temperature of the vapordistribution plate can be set to a value approximately equal to thevapor line temperature. However, it may be less, or it may be greater.

According to an embodiment of the invention, a dilution gas source 37 iscoupled to the process chamber 10 and/or vapor distribution system 30and is configured to add a dilution gas to dilute the process gascontaining the metal carbonyl precursor vapor and the CO gas. As shownin FIG. 1, the dilution gas source 37 can be coupled to the vapordistribution system 30 via feed line 37 a and configured to add thedilution gas to the process gas in the vapor distribution plenum 32before the process gas passes through the vapor distribution plate 34into the processing zone 33. Alternately, the dilution gas source 37 canbe coupled to the process chamber 10 via feed line 37 b and configuredto add the dilution gas to the process gas in the processing zone 33above the substrate 25 after the process gas passes through the vapordistribution plate 34. Still alternately, the dilution gas source 37 canbe coupled to the vapor distribution system 30 via feed line 37 c andconfigured to add the dilution gas to the process gas in thedistribution plate 34. As will be appreciated by those skilled in theart, the dilution gas can be added to the process gas at other locationsin the vapor distribution system 30 and the process chamber 10 withoutdeparting from the scope of the invention.

In yet another embodiment, the dilution gas is introduced to the processgas from the dilution gas source 37 through one of feed lines 37 a, 37b, 37 c, or other feed lines (not shown) in such a way that theconcentration of dilution gas at one region above substrate 25 can beadjusted to be different than the concentration of dilution gas atanother region above substrate 25. For example, the flow of dilution gasto a central region of substrate 25 can be different than the flow ofdilution gas to a peripheral region of substrate 25.

Once metal precursor vapor enters the processing zone 33, the metalprecursor vapor thermally decomposes upon adsorption at the substratesurface due to the elevated temperature of the substrate 25, and thethin metal film is formed on the substrate 25. The substrate holder 20is configured to elevate the temperature of substrate 25 by virtue ofthe substrate holder 20 being coupled to a substrate temperature controlsystem 22. For example, the substrate temperature control system 22 canbe configured to elevate the temperature of substrate 25 up toapproximately 500° C. In one embodiment, the substrate temperature canrange from about 100° C. to about 500° C. In another embodiment, thesubstrate temperature can range from about 300° C. to about 400° C.Additionally, process chamber 10 can be coupled to a chamber temperaturecontrol system 12 configured to control the temperature of the chamberwalls.

As described above, for example, conventional systems have contemplatedoperating the metal precursor vaporization system 50, as well as thevapor delivery system 40, within a temperature range of approximately40-45° C. for ruthenium carbonyl in order to limit metal vapor precursordecomposition and metal vapor precursor condensation. For example, theruthenium carbonyl precursor can decompose at elevated temperatures toform by-products, such as those illustrated below:Ru₃(CO)₁₂*(ad)

Ru₃(CO)_(x)*(ad)+(12−x)CO(g)  (1)or,Ru₃(CO)_(x)*(ad)

Ru₃(s)+xCO(g)  (2)wherein these by-products can adsorb (ad), i.e., condense, on theinterior surfaces of the deposition system 1. The accumulation ofmaterial on these surfaces can cause problems from one substrate to thenext, such as process repeatability. Alternatively, for example, theruthenium carbonyl precursor can condense at depressed temperatures tocause recrystallization, viz.Ru₃(CO)₁₂(g)

Ru₃(CO)₁₂*(ad)  (3).

In summary, the low vapor pressure of some metal carbonyl precursors(e.g., Ru₃(CO)₁₂) and the small process window result in a very lowdeposition rate of a metal layer on the substrate 25.

Adding a CO gas to the metal carbonyl precursor vapor can reduce theabove-mentioned problems that limit the delivery of the metal carbonylprecursor to the substrate. Thus, according to an embodiment of theinvention, the CO gas is added to the metal carbonyl precursor vapor toreduce dissociation of the metal carbonyl precursor vapor in the gasline, thereby shifting the equilibrium in Equation (1) to the left andreducing premature decomposition of the metal carbonyl precursor in thevapor precursor delivery system 40 prior to delivery of the metalcarbonyl precursor to the process chamber 10. It is believed thataddition of the CO gas to the metal carbonyl precursor vapor allows forincreasing the vaporization temperature from approximately 40° C. toapproximately 150° C., or higher. The elevated temperature increases thevapor pressure of the metal carbonyl precursor, resulting in increaseddelivery of the metal carbonyl precursor to the process chamber and,hence, increased deposition rate of the metal on the substrate 25.Furthermore, it has been visually observed that flowing a mixture of aninert gas, such as Ar, and the CO gas over or through the metal carbonylprecursor reduces premature decomposition of the metal carbonylprecursor.

According to an embodiment of the invention, the addition of CO gas to aRu₃(CO)₁₂ precursor vapor allows for maintaining the Ru₃(CO)₁₂ precursorvaporization temperature from approximately 40° C. to approximately 150°C. Alternately, the vaporization temperature can be maintained atapproximately 60° C. to approximately 90° C.

Thermal decomposition of metal carbonyl precursors and subsequent metaldeposition on the substrate 25 is thought to proceed predominantly by COelimination and desorption of CO by-products from the substrate 25.Incorporation of CO by-products into the metal layers during depositioncan result from incomplete decomposition of the metal carbonylprecursor, incomplete removal of CO by-products from the metal layer,and re-adsorption of CO by-products from the process chamber 10 onto themetal layer.

It is believed that CO incorporation into a metal layer duringdeposition leads to surface roughness in the form of nodules in themetal layer, where the growth of nodules is enhanced by increasedincorporation of CO by-products into the metal layer. The number ofnodules is expected to increase as the thickness of the metal layerincreases. Furthermore, the incorporation of CO by-products into themetal layer increases the resistivity of the metal layer.

Incorporation of CO by-products into the metal layer can be reduced by(1) lowering the process pressure, and (2) increasing the substratetemperature. In accordance with the present invention, it has beenrealized that the above-mentioned problems can also be reduced by addinga dilution gas in the process chamber 10 to the process gas containingthe metal carbonyl precursor vapor and the CO gas for controlling andreducing the partial pressure of by-products and the CO gas in theprocess chamber. Thus, according to an embodiment of the invention, adilution gas from dilution gas source 37 is added to the process gas forcontrolling and reducing the partial pressure of CO by-products on themetal layer and the partial pressure of CO in the process chamber 10,thereby forming a smooth metal layer. The dilution gas can include, forexample, an inert gas, such as a noble gas, He, Ne, Ar, Kr, or Xe, or amixture of two or more thereof. The dilution gas may further contain areducing gas to improve the material properties of the metal layer, forexample the electrical resistivity. The reducing gas can, for example,contain H₂, a silicon-containing gas (e.g., SiH₄, Si₂H₆, or SiCl₂H₂), aboron-containing gas (e.g., BH₃, B₂H₆, or B₃H₉), or anitrogen-containing gas (e.g., NH₃). According to an embodiment of theinvention, the process chamber pressure can be between about 0.1 mTorrand about 200 mTorr. Alternately, the process chamber pressure can bebetween about 1 mTorr and about 100 mTorr. Still alternately, theprocess chamber pressure can be between about 2 mTorr and about 50mTorr.

Since the addition of the CO gas to the metal carbonyl precursor vaporincreases the thermal stability of the metal carbonyl precursor vapor,the relative concentration of the metal carbonyl precursor vapor to theCO gas in the process gas can be utilized to control the decompositionrate of the metal carbonyl precursor on the substrate 25 at a certainsubstrate temperature. Furthermore, the substrate temperature can beutilized to control the decomposition rate (and thereby the depositionrate) of the metal on the substrate 25. As those skilled in the art willreadily appreciate, the amount of CO gas and the substrate temperaturecan easily be varied to allow for a desired vaporization temperature ofthe metal carbonyl precursor and for achieving a desired deposition rateof the metal carbonyl precursor on the substrate 25.

Furthermore, the amount of CO gas in the process gas can be selected sothat metal deposition on the substrate 25 from a metal carbonylprecursor occurs in a kinetic-limited temperature regime. For example,the amount of CO gas in the process gas can be increased until the metaldeposition process is observed to occur in a kinetic-limited temperatureregime. A kinetic-limited temperature regime refers to the range ofdeposition conditions where the deposition rate of a chemical vapordeposition process is limited by the kinetics of the chemical reactionsat the substrate surface, typically characterized by a strong dependenceof deposition rate on temperature. Unlike the kinetic-limitedtemperature regime, a mass-transfer limited regime is normally observedat higher substrate temperatures and includes a range of depositionconditions where the deposition rate is limited by the flux of chemicalreactants to the substrate surface. A mass-transfer limited regime ischaracterized by a strong dependence of deposition rate on metalcarbonyl precursor flow rate and is independent of depositiontemperature. Metal deposition in the kinetic-limited regime normallyresults in good step coverage and good conformality of the metal layeron patterned substrates. Conformality is commonly defined as thethinnest part of the metal layer on the sidewall of a feature on thepatterned substrate divided by the thickest part of the metal layer onthe sidewall. Step coverage is commonly defined as the sidewall coverage(metal layer thickness on sidewall divided by the metal layer thicknessaway from the feature) divided by the bottom coverage (metal layerthickness on the bottom of the feature divided by the metal layerthickness away from the feature).

As described above, the introduction of dilution gas to the process gascan be utilized for controlling and reducing the partial pressure of COby-products on the metal layer and the partial pressure of CO in theprocess chamber 10 in order to prepare a thin metal film havingdesirable properties. However, the inventors have observed that thepartial pressure of CO by-products, or the partial pressure of CO, orboth, can vary across substrate 25, thus leading to non-uniform filmproperties. For instance, it is suspected that the edge temperature ofconventional substrate holder 20 can be greater than the temperature ofsubstrate 25. The higher edge temperature for substrate holder 20 cancause an increase in the production of CO by-products (as suggestedabove), which can diffuse to the peripheral edge of substrate 25 causingCO poisoning of the thin metal film formed proximate the peripheral edgeof substrate 25. Therefore, in one example, as introduced above, theflow of dilution gas to the peripheral edge of substrate 25 can beadjusted relative to the flow of dilution gas to the central region ofsubstrate 25 in order to adjust the relative dilution of CO and COby-products.

Still referring to FIG. 1, optionally, the deposition system 1 can beperiodically cleaned using an in-situ cleaning system 70 coupled to, forexample, the vapor delivery system 40, as shown in FIG. 1. Per afrequency determined by the operator, the in-situ cleaning system 70 canperform routine cleanings of the deposition system 1 in order to removeaccumulated residue on internal surfaces of deposition system 1. Thein-situ cleaning system 70 can, for example, comprise a radicalgenerator configured to introduce chemical radical capable of chemicallyreacting and removing such residue. Additionally, for example, thein-situ cleaning system 70 can, for example, include an ozone generatorconfigured to introduce a partial pressure of ozone. For instance, theradical generator can include an upstream plasma source configured togenerate oxygen or fluorine radical from oxygen (O₂), nitrogentrifluoride (NF₃), O₃, XeF₂, ClF₃, or C₃F₈ (or, more generally,C_(x)F_(y)), respectively. The radical generator can include an ASTRON®reactive gas generator, commercially available from MKS Instruments,Inc., ASTeX® Products (90 Industrial Way, Wilmington, Mass. 01887).

Still referring the FIG. 1, the deposition system 1 can further includea control system 80 configured to operate and control the operation ofthe deposition system 1. The control system 80 is coupled to the processchamber 10, the substrate holder 20, the substrate temperature controlsystem 22, the chamber temperature control system 12, the vapordistribution system 30, the vapor delivery system 40, the film precursorvaporization system 50, the carrier gas supply system 60, the dilutiongas source 37, and the optional in-situ cleaning system 70.

In another embodiment, FIG. 2 illustrates a deposition system 100 fordepositing a metal film, such as a ruthenium (Ru) film, on a substrate.The deposition system 100 comprises a process chamber 110 having asubstrate holder 120 configured to support a substrate 125 upon whichthe metal layer is formed. The process chamber 110 is coupled to aprecursor delivery system 105 having metal precursor vaporization system150 configured to store and evaporate a metal carbonyl precursor 152,and a vapor precursor delivery system 140 configured to transport themetal carbonyl precursor 152 to the process chamber 110.

The process chamber 110 comprises an upper chamber section 111, a lowerchamber section 112, and an exhaust chamber 113. An opening 114 isformed within lower chamber section 112, where bottom section 112couples with exhaust chamber 113.

Referring still to FIG. 2, substrate holder 120 provides a horizontalsurface to support substrate (or wafer) 125, which is to be processed.The substrate holder 120 can be supported by a cylindrical supportmember 122, which extends upward from the lower portion of exhaustchamber 113. An optional guide ring 124 for positioning the substrate125 on the substrate holder 120 is provided on the edge of substrateholder 120. Furthermore, the substrate holder 120 comprises a heater 126coupled to substrate holder temperature control system 128. The heater126 can, for example, include one or more resistive heating elements.Alternately, the heater 126 can, for example, include a radiant heatingsystem, such as a tungsten-halogen lamp. The substrate holdertemperature control system 128 can include a power source for providingpower to the one or more heating elements, one or more temperaturesensors for measuring the substrate temperature or the substrate holdertemperature, or both, and a controller configured to perform at leastone of monitoring, adjusting, or controlling the temperature of thesubstrate 125 or substrate holder 120.

During processing, the heated substrate 125 can thermally decompose themetal carbonyl precursor vapor, and enable deposition of a metal layeron the substrate 125. According to an embodiment, the metal carbonylprecursor 152 can be a ruthenium carbonyl precursor, for exampleRu₃(CO)₁₂. As will be appreciated by those skilled in the art of thermalchemical vapor deposition, other metal carbonyl precursors and otherruthenium carbonyl precursors can be used without departing from thescope of the invention. The substrate holder 120 is heated to apre-determined temperature that is suitable for depositing the desiredRu metal layer or other metal layer onto the substrate 125.Additionally, a heater (not shown) coupled to a chamber temperaturecontrol system 121 can be embedded in the walls of process chamber 110to heat the chamber walls to a pre-determined temperature. The heatercan maintain the temperature of the walls of process chamber 110 fromabout 40° C. to about 150° C., or from about 40° C. to about 80° C. Apressure gauge (not shown) is used to measure the process chamberpressure. According to an embodiment of the invention, the processchamber pressure can be between about 0.1 mtorr and about 200 mtorr.Alternately, the process chamber pressure can be between about 1 mtorrand about 100 mtorr. Still alternately, the process chamber pressure canbe between about 2 mtorr and about 50 mtorr.

Also shown in FIG. 2, a vapor distribution system 130 is coupled to theupper chamber section 111 of process chamber 110. Vapor distributionsystem 130 comprises a vapor distribution plate 131 configured tointroduce precursor vapor from vapor distribution plenum 132 to aprocessing zone 133 above substrate 125 through one or more orifices134.

According to an embodiment of the invention, a dilution gas source 137is coupled to the process chamber 110 and is configured to add adilution gas to dilute the process gas containing the metal carbonylprecursor vapor and the CO gas using feed lines 137 a, 137 b, and/or 137c, valves 197, one or more filters (not shown), and a mass flowcontroller (not shown). As shown in FIG. 2, the dilution gas source 137can be coupled to the vapor distribution system 130 of process chamber110 and is configured to add the dilution gas to the process gas in thevapor distribution plenum 132 via feed line 137 a before the process gaspasses through the vapor distribution plate 131 into the processing zone133 above the substrate 125, or the dilution gas source 137 can beconfigured to add the dilution gas to the process gas inside the vapordistribution plate 131 via feed line 137 c. Alternately, the dilutiongas source 137 can be coupled to the process chamber 110 and isconfigured to add the dilution gas to the process gas in the processingzone 133 via feed line 137 b after the process gas passes through thevapor distribution plate 131. As will be appreciated by those skilled inthe art, the dilution gas can be added to the process gas at otherlocations in the process chamber 110 without departing from the scope ofthe invention.

In yet another embodiment, the dilution gas is introduced to the processgas from the dilution gas source 137 through one of feed lines 137 a,137 b, 137 c, or other feed lines (not shown) in such a way that theconcentration of dilution gas at one region above substrate 125 can beadjusted to be different than the concentration of dilution gas atanother region above substrate 125. For example, the flow of dilutiongas to a central region of substrate 125 can be different than the flowof dilution gas to a peripheral region of substrate 125.

Furthermore, an opening 135 is provided in the upper chamber section 111for introducing a metal carbonyl precursor vapor from vapor precursordelivery system 140 into vapor distribution plenum 132. Moreover,temperature control elements 136, such as concentric fluid channelsconfigured to flow a cooled or heated fluid, are provided forcontrolling the temperature of the vapor distribution system 130, andthereby prevent the decomposition or condensation of the metal carbonylprecursor inside the vapor distribution system 130. For instance, afluid, such as water, can be supplied to the fluid channels from a vapordistribution temperature control system 138. The vapor distributiontemperature control system 138 can include a fluid source, a heatexchanger, one or more temperature sensors for measuring the fluidtemperature or vapor distribution plate temperature or both, and acontroller configured to control the temperature of the vapordistribution plate 131 from about 20° C. to about 150° C.

As illustrated in FIG. 2, a metal precursor vaporization system 150 isconfigured to hold a metal carbonyl precursor 152 and evaporate (orsublime) the metal carbonyl precursor 152 by elevating the temperatureof the metal carbonyl precursor. A precursor heater 154 is provided forheating the metal carbonyl precursor 152 to maintain the metal carbonylprecursor 152 at a temperature that produces a desired vapor pressure ofmetal carbonyl precursor 152. The precursor heater 154 is coupled to avaporization temperature control system 156 configured to control thetemperature of the metal carbonyl precursor 152. For example, theprecursor heater 154 can be configured to adjust the temperature of themetal carbonyl precursor 152 from about 40° C. to about 150° C., or fromabout 60° C. to about 90° C.

As the metal carbonyl precursor 152 is heated to cause evaporation (orsublimation), a carrier gas can be passed over or through the metalcarbonyl precursor 152, or any combination thereof. The carrier gas caninclude, for example, an inert gas, such as a noble gas (i.e., He, Ne,Ar, Kr, Xe). Alternately, other embodiments contemplate omitting theinert carrier gas. According to an embodiment of the invention, a CO gascan be added to the inert carrier gas. Alternately, other embodimentscontemplate the CO gas replacing the inert carrier gas. For example, agas supply system 160 is coupled to the metal precursor vaporizationsystem 150, and it is configured to, for instance, flow the carrier gas,the CO gas, or both, over or through the metal carbonyl precursor 152.Although not shown in FIG. 2, gas supply system 160 can also oralternatively be coupled to the vapor precursor delivery system 140 tosupply the CO gas and optional inert carrier gas to the vapor of themetal precursor 152 as or after it enters the vapor precursor deliverysystem 140. The gas supply system 160 can comprise a gas source 161containing an inert carrier gas, a CO gas, or a mixture thereof, one ormore control valves 162, one or more filters 164, and a mass flowcontroller 165. For instance, the mass flow rate of inert carrier gas orthe CO gas can range from approximately 0.1 sccm to approximately 1000sccm.

Additionally, a sensor 166 is provided for measuring the total gas flowfrom the metal precursor vaporization system 150. The sensor 166 can,for example, comprise a mass flow controller, and the amount of metalcarbonyl precursor vapor delivered to the process chamber 110 can bedetermined using sensor 166 and mass flow controller 165. Alternately,the sensor 166 can comprise a light absorption sensor to measure theconcentration of the metal carbonyl precursor in the gas flow to theprocess chamber 110.

A bypass line 167 can be located downstream from sensor 166, and it canconnect the vapor delivery system 140 to an exhaust line 116. Bypassline 167 is provided for evacuating the vapor precursor delivery system140, and for stabilizing the supply of the metal carbonyl precursor tothe process chamber 110. In addition, a bypass valve 168, locateddownstream from the branching of the vapor precursor delivery system140, is provided on bypass line 167.

Referring still to FIG. 2, the vapor precursor delivery system 140comprises a high conductance vapor line having first and second valves141 and 142, respectively. Additionally, the vapor precursor deliverysystem 140 can further comprise a vapor line temperature control system143 configured to heat the vapor precursor delivery system 140 viaheaters (not shown). The temperatures of the vapor lines can becontrolled to avoid condensation of the metal carbonyl precursor vaporin the vapor line. The temperature of the vapor lines can be controlledfrom about 20° C. to about 100° C., or from about 40° C. to about 90° C.

Moreover, a CO gas can be supplied from a gas supply system 190. Forexample, the gas supply system 190 is coupled to the vapor precursordelivery system 140, and it is configured to, for instance, mix the COgas with the metal carbonyl precursor vapor in the vapor precursordelivery system, for example, downstream of valve 141. The gas supplysystem 190 can comprise a CO gas source 191, one or more control valves192, one or more filters 194, and a mass flow controller 195. Forinstance, the mass flow rate of CO gas can range from approximately 0.1sccm to approximately 1000 sccm.

Mass flow controllers 165 and 195, and valves 162, 192, 168, 141, and142 are controlled by controller 196, which controls the supply,shutoff, and the flow of the inert carrier gas, the CO gas, and themetal carbonyl precursor vapor. Sensor 166 is also connected tocontroller 196 and, based on output of the sensor 166, controller 196can control the carrier gas flow through mass flow controller 165 toobtain the desired metal carbonyl precursor flow to the process chamber110.

Furthermore, as described above, and as shown in FIG. 2, an optionalin-situ cleaning system 170 is coupled to the precursor delivery system105 of deposition system 100 through cleaning valve 172. For instance,the in-situ cleaning system 170 can be coupled to the vapor deliverysystem 140. The in-situ cleaning system 170 can, for example, comprise aradical generator configured to introduce chemical radical capable ofchemically reacting and removing such residue. Additionally, forexample, the in-situ cleaning system 170 can, for example, include anozone generator configured to introduce a partial pressure of ozone. Forinstance, the radical generator can include an upstream plasma sourceconfigured to generate oxygen or fluorine radical from oxygen (O₂),nitrogen trifluoride (NF₃), ClF₃, O₃, XeF₂, or C₃F₈ (or, more generally,C_(x)F_(y)), respectively. The radical generator can include an ASTRON®reactive gas generator, commercially available from MKS Instruments,Inc., ASTeX® Products (90 Industrial Way, Wilmington, Mass. 01887).

As illustrated in FIG. 2, the exhaust line 116 connects exhaust chamber113 to pumping system 118. A vacuum pump 119 is used to evacuate processchamber 110 to the desired degree of vacuum, and to remove gaseousspecies from the process chamber 110 during processing. An automaticpressure controller (APC) 115 and a trap 117 can be used in series withthe vacuum pump 119. The vacuum pump 119 can include a turbo-molecularpump (TMP) capable of a pumping speed up to 500 liters per second (andgreater). Alternately, the vacuum pump 119 can include a dry roughingpump. During processing, the process gas can be introduced into theprocess chamber 110, and the chamber pressure can be adjusted by the APC115. The APC 115 can comprise a butterfly-type valve or a gate valve.The trap 117 can collect unreacted metal carbonyl precursor material andby-products from the process chamber 110.

Referring back to the substrate holder 120 in the process chamber 110,as shown in FIG. 2, three substrate lift pins 127 (only two are shown)are provided for holding, raising, and lowering the substrate 125. Thesubstrate lift pins 127 are coupled to plate 123, and can be lowered tobelow to the upper surface of substrate holder 120. A drive mechanism129 utilizing, for example, an air cylinder provides means for raisingand lowering the plate 123. Substrate 125 can be transferred into andout of process chamber 110 through gate valve 200 and chamberfeed-through passage 202 via a robotic transfer system (not shown), andreceived by the substrate lift pins 127. Once the substrate 125 isreceived from the transfer system, it can be lowered to the uppersurface of the substrate holder 120 by lowering the substrate lift pins127.

Referring again to FIG. 2, a controller 180 includes a microprocessor, amemory, and a digital I/O port capable of generating control voltagessufficient to communicate and activate inputs of the processing system100 as well as monitor outputs from the processing system 100. Moreover,the processing system controller 180 is coupled to and exchangesinformation with process chamber 110; precursor delivery system 105,which includes controller 196, vapor line temperature control system143, metal precursor vaporization system 150, gas supply system 190, gassupply system 160, and vaporization temperature control system 156;vapor distribution temperature control system 138; dilution gas source137; vacuum pumping system 118; and substrate holder temperature controlsystem 128. In the vacuum pumping system 118, the controller 180 iscoupled to and exchanges information with the automatic pressurecontroller 115 for controlling the pressure in the process chamber 110.A program stored in the memory is utilized to control the aforementionedcomponents of deposition system 100 according to a stored processrecipe. One example of processing system controller 180 is a DELLPRECISION WORKSTATION 610™, available from Dell Corporation, Dallas,Tex. The controller 180 may also be implemented as a general-purposecomputer, digital signal process, etc.

Controller 180 may be locally located relative to the deposition system100, or it may be remotely located relative to the deposition system 100via the internet or an intranet. Thus, controller 180 can exchange datawith the deposition system 100 using at least one of a directconnection, an intranet, or the internet. Controller 180 may be coupledto an intranet at a customer site (i.e., a device maker, etc.), orcoupled to an intranet at a vendor site (i.e., an equipmentmanufacturer). Furthermore, another computer (i.e., controller, server,etc.) can access controller 180 to exchange data via at least one of adirect connection, an intranet, or the internet.

Referring now to FIG. 3, a vapor distribution system 230 is illustratedin accordance with one embodiment of the present invention. The vapordistribution system 230 comprises a housing 236 configured to be coupledto or within a process chamber of a deposition system (such as processchamber 10 or 110 of deposition system 1 or 100, respectively), and avapor distribution plate 231 configured to be coupled to the housing236, wherein the combination form a plenum 232. The vapor distributionsystem 230 is configured to receive a process gas 220 into the plenum232 from vapor delivery system 240 through opening 235. The vapordistribution plate 231 comprises a plurality of orifices 234 arranged tointroduce and distribute the process gas 220 from plenum 232 to aprocess space 233 proximate a substrate (not shown) upon which a metalfilm is to be formed.

In addition, the vapor distribution system 230 is configured to receivea dilution gas 250 from a dilution gas source (not shown) into plenum232, hence, permitting the process gas 220 and the dilution gas 250 tomix in the plenum 232. Thereafter, the mixture of the dilution gas 250and the process gas 220 is distributed into process space 233 via thevapor distribution plate 231.

In a further embodiment illustrated in FIG. 3, the plenum 232 ispartitioned, for example, into peripheral plenum region 232A and centralplenum region 232B using an optional partition 232C such that only aselect region or regions (e.g., peripheral plenum region 232A) of plenum232 receives dilution gas 250. The dilution gas 250 can, for example,include an inert gas, such as Ar, or any one of the dilution gasespresented above. It may be appreciated that a plurality of partitionsand dilution gas feed locations into the plenum 232 can create anynumber of desired regions for creating varying dilution gasconcentration in the process gas 220 as it is distributed into theprocess space 233.

Referring now to FIG. 4, a vapor distribution system 330 is illustratedin accordance with another embodiment of the present invention. Thevapor distribution system 330 comprises a housing 336 configured to becoupled to or within a process chamber of a deposition system (such asprocess chamber 10 or 110 of deposition system 1 or 100, respectively),a vapor distribution plate 331 configured to be coupled to housing 336,and an intermediate vapor distribution plate 341 configured to becoupled to housing 336 between opening 335 and vapor distribution plate331, wherein the combination of housing 336, vapor distribution plate331 and intermediate vapor distribution plate 341 form a plenum 332between opening 335 and intermediate vapor distribution plate 341, andan intermediate plenum 342 between distribution plates 331 and 341, asshown in FIG. 4. The vapor distribution system 330 is configured toreceive a process gas 320 into plenum 332 from vapor delivery system 340through opening 335. The intermediate vapor distribution plate 341comprises a plurality of orifices 344 arranged to introduce the processgas 320 in plenum 332 to the intermediate plenum 342. The vapordistribution plate 331 comprises a plurality of orifices 334 arranged tointroduce and distribute the process gas 320 from intermediate plenum342 to a process space 333 proximate a substrate (not shown) upon whicha metal film is to be formed.

In addition, the vapor distribution system 330 is configured to receivea dilution gas 350 from a dilution gas source (not shown) into theintermediate plenum 342, hence, permitting the process gas 320 and thedilution gas 350 to mix in the intermediate plenum 342. Thereafter, themixture of the dilution gas 350 and the process gas 320 is distributedinto process space 333 via the vapor distribution plate 331. Thedilution gas 350 can, for example, include an inert gas, such as Ar, orany one of the dilution gases presented above.

In a further embodiment, the intermediate plenum 342 is partitioned, forexample, into peripheral plenum region 342A and central plenum region342B using an optional partition 342C such that only a select region orregions (e.g., peripheral plenum region 342A) of intermediate plenum 342receives dilution gas 350. In addition, in one embodiment, the pluralityof orifices 344 in intermediate vapor distribution plate 341 are alignedwith the plurality of orifices 334 in vapor distribution plate 331. Inan alternate embodiment, depicted in FIG. 4, the plurality of orifices344 in intermediate vapor distribution plate 341 are not aligned withthe plurality of orifices 334 in vapor distribution plate 331.

Referring now to FIG. 5, a vapor distribution system 430 is illustratedin accordance with another embodiment of the present invention. Thevapor distribution system 430 comprises a housing 436 configured to becoupled to or within a process chamber of a deposition system (such asprocess chamber 10 or 110 of deposition system 1 or 100, respectively),and a multi-gas vapor distribution plate 431 configured to be coupled tothe housing 436, wherein the combination form a plenum 432. The vapordistribution system 430 is configured to receive a process gas 420 intothe plenum 432 from vapor delivery system 440 through opening 435. Themulti-gas vapor distribution plate 431 comprises a first set of orifices434 arranged to introduce and distribute the process gas 420 from plenum432 to a process space 433 proximate a substrate (not shown) upon whicha metal film is to be formed.

Additionally, the multi-gas vapor distribution plate 431 comprises asecond set of orifices 444 coupled to an intermediate plenum 442embedded within the multi-gas vapor distribution plate 431. The vapordistribution system 430 is configured to receive a dilution gas 450 froma dilution gas source (not shown) into the intermediate plenum 442, andto introduce dilution gas 450 from the intermediate plenum 442 intoprocess space 433 for uniform mixing with the process gas 420 in theprocess space 433. The dilution gas 450 can, for example, include aninert gas, such as Ar, or any one of the dilution gases presented above.

Referring now to FIG. 6, a vapor distribution system 530 is illustratedin accordance with another embodiment of the present invention. Thevapor distribution system 530 comprises a housing 536 configured to becoupled to or within a process chamber of a deposition system (such asprocess chamber 10 or 110 of deposition system 1 or 100, respectively),and a multi-gas vapor distribution plate 531 configured to be coupled tothe housing 536, wherein the combination form a plenum 532. The vapordistribution system 530 is configured to receive a process gas 520 intothe plenum 532 from vapor delivery system 540 through opening 535. Themulti-gas vapor distribution plate 531 comprises a first set of orifices534 arranged to introduce and distribute the process gas 520 from plenum532 to a process space 533 proximate a substrate (not shown) upon whicha metal film is to be formed.

Additionally, the multi-gas vapor distribution plate 531 comprises asecond set of peripheral orifices 544 coupled to an intermediateperipheral plenum 542 embedded within the multi-gas vapor distributionplate 531. The vapor distribution system 530 is configured to receive afirst dilution gas 550 from a dilution gas source (not shown) into theintermediate peripheral plenum 542, and to introduce the first dilutiongas 550 from the intermediate peripheral plenum 542 to a peripheralregion in process space 533 substantially above a peripheral region ofthe substrate, for mixing of the first dilution gas 550 with the processgas 520 in the peripheral region. Furthermore, the multi-gas vapordistribution plate 531 comprises a third set of orifices 564 coupled toan intermediate central plenum 562 embedded within the multi-gas vapordistribution plate 531. The vapor distribution system 530 is furtherconfigured to receive a second dilution gas 570 from a dilution gassource (not shown) into the intermediate central plenum 562, and tointroduce the second dilution gas 570 from the intermediate centralplenum 562 to a central region in process space 533 above a centralregion of the substrate, for mixing of the second dilution gas 570 withthe process gas 520 in the central region. The flow rate of the firstdilution gas 550 and the flow rate of the second dilution gas 570 may bevaried relative to one another in order to affect changes in theuniformity of the metal film deposited on the substrate. The firstdilution gas 550 and the second dilution gas 570 can, for example,include an inert gas, such as Ar, or any one of the dilution gasespresented above.

Referring now to FIG. 7, a vapor distribution system 630 is illustratedin accordance with another embodiment of the present invention. Thevapor distribution system 630 comprises a housing 636 configured to becoupled to or within a process chamber of a deposition system (such asprocess chamber 10 or 110 of deposition system 1 or 100, respectively),and a multi-gas vapor distribution plate 631 configured to be coupled tothe housing 636, wherein the combination form a plenum 632. The vapordistribution system 630 is configured to receive a process gas 620 intothe plenum 632 from vapor delivery system 640 through opening 635. Themulti-gas vapor distribution plate 631 comprises a first set of orifices634 arranged to introduce and distribute the process gas 620 from theplenum 632 to a process space 633 proximate a substrate (not shown) uponwhich a metal film is to be formed.

Additionally, the multi-gas vapor distribution plate 631 comprises asecond set of peripheral orifices 644 coupled to an intermediateperipheral plenum 642 embedded within the multi-gas vapor distributionplate 631. The vapor distribution system 630 is configured to receive adilution gas 650 from a dilution gas source (not shown) into theintermediate peripheral plenum 642, and to introduce the dilution gas650 from the intermediate peripheral plenum 642 to a peripheral regionin process space 633 substantially above a peripheral region of thesubstrate, for mixing of the dilution gas 650 with the process gas 520in the peripheral region. The dilution gas 650 can, for example, includean inert gas, such as Ar, or any one of the dilution gases presentedabove.

FIG. 8 illustrates a method of depositing a metal layer on a substrateaccording to an embodiment of the invention. The method 700 includes, at710, providing a substrate in a process chamber of a deposition system.For example, the deposition system can include the depositions systemsdescribed above in FIGS. 1 and 2. The substrate can, for example, be aSi substrate. A Si substrate can be of n- or p-type, depending on thetype of device being formed. The substrate can be of any size, forexample a 200 mm substrate, a 300 mm substrate, or an even largersubstrate. According to an embodiment of the invention, the substratecan be a patterned substrate containing one or more vias or trenches, orcombinations thereof.

At 720, a process gas containing a metal carbonyl precursor vapor and aCO gas is formed. The process gas can further contain an inert carriergas. As described above, according to one embodiment, the metal carbonylprecursor can be a ruthenium carbonyl precursor, for example Ru₃(CO)₁₂.Addition of the CO gas to the metal carbonyl precursor vapor allows forincreasing the vaporization temperature of the metal carbonyl precursor.The elevated temperature increases the vapor pressure of the metalcarbonyl precursor, resulting in increased delivery of the metalcarbonyl precursor to the process chamber and, hence, increaseddeposition rate of the metal on a substrate.

According to an embodiment of the invention, the process gas can beformed by heating a metal carbonyl precursor to form the metal carbonylprecursor vapor, and mixing the CO gas with the metal carbonyl precursorvapor. According to an embodiment of the invention, the CO gas can bemixed with the metal carbonyl precursor vapor downstream from the metalcarbonyl precursor, for example, in the vapor precursor delivery system40 or 140. According to another embodiment of the invention, the CO gascan be mixed with the metal carbonyl precursor vapor by flowing the COgas over or through the metal carbonyl precursor, for example, in themetal precursor vaporization system 50 or 150. According to yet anotherembodiment of the invention, the process gas can be formed byadditionally flowing an inert carrier gas over or through the metalcarbonyl precursor.

At 730, a dilution gas is added to the process gas downstream of thevapor delivery system, and more specifically, in the process chamberand/or the vapor distribution system, to form a diluted process gas. Asdescribed in FIGS. 1 and 2, the dilution gas can be added to the processgas in a vapor distribution plenum before the process gas passes througha vapor distribution plate into a processing zone above the substrate.Alternately, the dilution gas can be added to the process gas in theprocessing zone above the substrate after the process gas flows throughthe vapor distribution plate. Still alternately, the dilution gas can beadded to the process gas in the vapor distribution plate.

At 740, which may coincide with 730, the dilution gas is introduced tothe process gas in such a way that the concentration of dilution gas atone region above the substrate can be adjusted to be different than theconcentration of dilution gas at another region above the substrate. Inone example, the flow of dilution gas to a central region of thesubstrate can be different than the flow of dilution gas to a peripheralregion of the substrate. In another example, the flow of dilution gasexists only to the peripheral region of the substrate, while thereexists no flow of dilution gas to the central region of the substrate.Adjusting the relative dilution of process gas at the center of thesubstrate relative to the peripheral region of the substrate canfacilitate tailoring the film properties of the thin film across thesubstrate.

At 750, the substrate is exposed to the diluted process gas to deposit ametal layer on the substrate by a thermal chemical vapor depositionprocess. According to an embodiment of the invention, the metal layercan be deposited at a substrate temperature between about 50° C. andabout 500° C. Alternately, the substrate temperature can be betweenabout 300° C. and about 400° C.

As would be appreciated by those skilled in the art, each of the stepsor stages in the flowchart of FIG. 8 may encompass one or more separatesteps and/or operations. Accordingly, the recitation of only five stepsin 710, 720, 730, 740, and 750 should not be understood to limit themethod of the present invention solely to five steps or stages.Moreover, each representative step or stage 710, 720, 730, 740, 750should not be understood to be limited to only a single process.

FIGS. 9A-9C schematically show formation of a metal layer on a patternedsubstrate according to embodiments of the invention. As those skilled inthe art will readily appreciate, embodiments of the invention can beapplied to patterned substrates containing one or more vias or trenches,or combinations thereof. FIG. 9A schematically shows deposition of ametal layer 840 onto a patterned structure 800 according to anembodiment of the invention. The patterned structure 800 contains afirst metal layer 810, and a patterned layer 820 containing an opening830. The patterned layer 820 can, for example, be a dielectric material.The opening 830 can, for example, be a via or a trench, and the metallayer 840 can, for example, contain Ru metal.

FIG. 9B schematically shows deposition of a metal layer 860 onto apatterned structure 802 according to another embodiment of theinvention. The patterned structure 802 contains a first metal layer 810and a patterned layer 820 containing an opening 830. A barrier layer 850is deposited onto the patterned structure 802, and a metal layer 860 isdeposited on the barrier layer 850. The barrier layer 850 can, forexample, contain a tantalum-containing material (e.g., Ta, TaN, or TaCN,or a combination of two or more thereof) or a tungsten material (e.g.,W, WN). The patterned layer 820 can, for example, be a dielectricmaterial. The opening 830 can, for example, be a via or a trench, andthe metal layer 860 can, for example, contain Ru metal. FIG. 9Cschematically shows deposition of Cu in the opening 830 of FIG. 9B.

The metal layers 840 and 860 may be deposited, as described above, usinga process gas comprising a metal carbonyl precursor, for example aruthenium carbonyl, and carbon monoxide (CO). A dilution gas is mixedwith the process gas downstream of the vapor delivery system in order tomaintain the desired partial pressure of CO gas during transport of theprecursor vapor through the vapor delivery system to the process system,yet reduce CO poisoning of the substrate in the process chamber. Forexample, the mixing may occur in a process space above the substrate inthe process chamber; in a plenum of a vapor distribution system coupledto or within the process chamber; or within a vapor distribution plateof a vapor distribution system coupled to or within the process chamber,where the plate is configured to deliver the process gas from a plenumto a process space above the substrate in the process chamber. Further,the dilution gas may be mixed with the process gas only in a peripheralregion of the process space, plenum, or distribution plate, or at agreater concentration in the peripheral region relative to a centralregion, to reduce CO poisoning at the peripheral edges (not shown) ofpatterned structures 800 and 802.

Although only certain exemplary embodiments of this invention have beendescribed in detail above, those skilled in the art will readilyappreciate that many modifications are possible in the exemplaryembodiments without materially departing from the novel teachings andadvantages of this invention. Accordingly, all such modifications areintended to be included within the scope of this invention.

1. A deposition system for forming a metal layer on a substrate,comprising: a process chamber having a substrate holder configured tosupport said substrate and heat said substrate, and a pumping systemconfigured to evacuate said process chamber; a metal precursorvaporization system configured to vaporize a metal carbonyl precursor toform a metal carbonyl precursor vapor; a vapor distribution systemcoupled to or within said process chamber and configured to introducesaid metal carbonyl precursor vapor to a process space above saidsubstrate and a dilution gas to said process space above said substrate,said process space comprising a first process region above asubstantially peripheral portion of said substrate and a second processregion above a substantially central portion of said substrate, whereinsaid vapor distribution system is configured to adjust a distribution ofthe partial pressure of said dilution gas across said substrate betweensaid first process region and said second process region; a dilution gassource coupled to said vapor distribution system and configured tosupply said dilution gas to at least one of said first process region orsaid second process region; a vapor delivery system having a first endcoupled to an outlet of said metal precursor vaporization system and asecond end coupled to an opening of said vapor distribution system; anda gas supply system coupled to at least one of said metal precursorvaporization system or said vapor delivery system, or both, andconfigured to supply a CO gas to transport said metal carbonyl precursorvapor in said CO gas to said inlet of said vapor distribution system,wherein said vapor distribution system comprises: a housing having saidopening formed therein; a vapor distribution plate coupled to saidhousing and configured to face said substrate; an intermediate vapordistribution plate positioned within said housing between said openingand said vapor distribution plate, wherein the combination of saidhousing, said intermediate vapor distribution plate and said vapordistribution plate form a plenum between said opening and saidintermediate vapor distribution plate and an intermediate plenum betweensaid intermediate vapor distribution plate and said vapor distributionplate, wherein said vapor distribution system is configured to receivesaid CO gas and said metal precursor vapor into said plenum through saidopening formed in said housing, wherein said intermediate vapordistribution plate includes a first array of openings formed therein andconfigured to distribute said CO gas and said metal precursor vapor fromsaid plenum to said intermediate plenum, wherein said dilution gassource is coupled to said intermediate plenum downstream of said plenumand is configured to supply said dilution gas to said intermediateplenum for diluting said CO gas and said metal precursor vapor thatpasses through said first array of openings into said intermediateplenum, and wherein said vapor distribution plate includes a secondarray of openings formed therein and configured to re-distribute said COgas and said metal precursor vapor with said dilution gas from saidintermediate plenum to said process space above said substrate; and apartition positioned within said intermediate plenum and configured toseparate said intermediate plenum into a peripheral plenum region and acentral plenum region, wherein said vapor distribution system isconfigured to receive said dilution gas into said peripheral plenumregion, whereby said CO gas and said metal precursor vapor with saiddilution gas are re-distributed to a substantially peripheral region ofsaid process space through said openings in said vapor distributionplate.
 2. The deposition system according to claim 1, wherein saiddilution gas comprises an inert gas.
 3. The deposition system accordingto claim 1, wherein said dilution gas comprises a noble gas.
 4. Thedeposition system according to claim 1, wherein said gas supply systemis further configured to supply an inert carrier gas to transport saidmetal carbonyl precursor vapor.
 5. The deposition system according toclaim 4, wherein said inert carrier gas comprises a noble gas.
 6. Thedeposition system according to claim 1, wherein said substrate holder isconfigured to heat said substrate to a substrate temperature betweenabout 50° C. and about 500° C.
 7. The deposition system according toclaim 1, wherein said substrate holder is configured to heat saidsubstrate to a substrate temperature between about 200° C. and about400° C.
 8. The deposition system according to claim 1, wherein saidpumping system is configured to evacuate said process chamber to apressure ranging from approximately 0.1 mTorr to approximately 200mTorr.
 9. The deposition system according to claim 1, wherein saidpumping system is configured to evacuate said process chamber to apressure ranging from approximately 1 mTorr to approximately 100 mTorr.10. The deposition system according to claim 1, wherein said metalcarbonyl precursor comprises W(CO)₆, Ni(CO)₄, Mo(CO)₆, Co₂(CO)₈,Rh₄(CO)₁₂, Re₂(CO)₁₀, Cr(CO)₆, Ru₃(CO)₁₂, or OS₃(CO)₁₂, or a combinationof two or more thereof.
 11. The deposition system according to claim 1,wherein said metal precursor vaporization system is configured to heatsaid metal carbonyl precursor to a temperature between about 40° C. andabout 150° C.
 12. The deposition system according to claim 1, whereinsaid metal precursor vaporization system is configured to heat saidmetal carbonyl precursor to a temperature between about 60° C. and about90° C.
 13. A deposition system for forming a metal layer on a substrate,comprising: a process chamber having a substrate holder configured tosupport said substrate and heat said substrate, and a pumping systemconfigured to evacuate said process chamber; a metal precursorvaporization system configured to vaporize a metal carbonyl precursor toform a metal carbonyl precursor vapor; a vapor distribution systemcoupled to or within said process chamber and configured to introducesaid metal carbonyl precursor vapor to a process space above saidsubstrate and a dilution gas to said process space above said substrate,said process space comprising a first process region above asubstantially peripheral portion of said substrate and a second processregion above a substantially central portion of said substrate, whereinsaid vapor distribution system is configured to adjust a distribution ofthe partial pressure of said dilution gas across said substrate betweensaid first process region and said second process region; a dilution gassource coupled to said vapor distribution system and configured tosupply said dilution gas to at least one of said first process region orsaid second process region; a vapor delivery system having a first endcoupled to an outlet of said metal precursor vaporization system and asecond end coupled to an opening of said vapor distribution system; anda gas supply system coupled to at least one of said metal precursorvaporization system or said vapor delivery system, or both, andconfigured to supply a CO gas to transport said metal carbonyl precursorvapor in said CO gas to said inlet of said vapor distribution system,wherein said vapor distribution system comprises: a housing having saidopening formed therein; and a vapor distribution plate coupled to saidhousing and configured to face said substrate, wherein the combinationof said housing and said vapor distribution plate form a plenumconfigured to receive said CO gas and said metal precursor vapor at afirst concentration from said vapor delivery system through said openingformed in said housing, and wherein said vapor distribution platecomprises a plurality of through-holes formed therein and configured todistribute said CO gas and said metal precursor vapor to said processspace above said substrate, wherein said vapor distribution platecomprises a first intermediate plenum formed in a first region thereofand a first array of orifices pneumatically coupling said firstintermediate plenum to said first process region in said process space,and wherein said dilution gas source is coupled to said firstintermediate plenum and said vapor distribution system is configured toreceive said dilution gas into said first intermediate plenum at a firstflow rate and said vapor distribution system is configured to distributesaid dilution gas to said first process region through said first arrayof orifices for diluting said CO gas and said metal precursor vapordownstream of said through-holes to a second concentration lower thansaid first concentration in said first process region, wherein saidvapor distribution plate further comprises a second intermediate plenumformed in a second region thereof and a second array of orificespneumatically coupling said second intermediate plenum to said secondprocess region in said process space, and wherein said dilution gassource is coupled to said second intermediate plenum and said vapordistribution system is configured to receive said dilution gas into saidsecond intermediate plenum at a second flow rate and to distribute saiddilution gas to said second process region through said second array oforifices for diluting said CO gas and said metal precursor vapordownstream of said through-holes to a third concentration lower thansaid first concentration in said second process region.
 14. Thedeposition system according to claim 13, wherein said metal carbonylprecursor comprises W(CO)₆, Ni(CO)₄, Mo(CO)₆, Co₂(CO)₈, Rh₄(CO)₁₂,Re₂(CO)₁₀, Cr(CO)₆, Ru₃(CO)₁₂, or Os₃(CO)₁₂, or a combination of two ormore thereof.